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Automated optimal synthesis of microresonators

Authors: Fedder, Gary K.; Iyer, Sitaraman; Mukherjee, Tamal;

Automated optimal synthesis of microresonators

Abstract

The rapid layout synthesis of a microresonator from high-level functional specifications and design constraints is demonstrated. Functional parameters such as resonant frequency, quality factor, and displacement amplitude at resonance are satisfied while simultaneously minimizing an objective function. The optimal synthesis tool allows exploration of micromechanical design issues and objectives, as illustrated with a polysilicon lateral resonator example modeled in three mechanical degrees-of-freedom. Layouts for three sets of five different resonators from 3 kHz to 300 kHz are generated, with each set globally optimized to minimize either active device area, electrostatic drive voltage, or a weighted combination of area and drive voltage.

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Intelligent robotics

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    influence
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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
19
Average
Top 10%
Top 10%
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