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A Non-contact Inductive Position Sensor For Use In Micro Machines

Authors: R.B. Zmood; Y.C. Zhang; P.L. Yu;

A Non-contact Inductive Position Sensor For Use In Micro Machines

Abstract

Al need has arisen in research on micro machines for mi cro position sensors which are less affected by scaling laws than existing capacitive sensors. This paper de- scribes the development and operation of a non-contact inductive position sensor for use in micro magnetic bearings. As the sensor footprint area, in the micro machines being considered, will be less than I mm square the sensor coil inductances and impedance levels are small, and the parasitic and demodulator input capacitances begin to have a major influence on the transducer op- eration. To minimize the loading effect of these capac itances wideband current to voltage (I-V) converters have been introduced to match the output of the sen sor coils to the input of the signal conditioner circuit. Test results for these I-V converters are presented. Also overall test results of the position transducers showing transducer linearity and sensitivity for a range of sensor coils are presented.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
9
Average
Top 10%
Top 10%
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