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The paper describes two similar deformable mirrors that will demonstrate the feasibility of nanolaminate-based deformable mirrors over a wide range of size scales. Two complementary technologies: high-spatial-density electrostatic actuators and thin, flexible, lightweight nanolaminate foils are combined. Electrostatic actuation of MEMS-like structures provides densely-spaced, repeatable deflections on the order of 10 mum. Nanolaminate foils provide a mirror surface that is simultaneously flexible enough to deform under electrostatic forces and tough enough to survive handling and bonding
General Physics, Mirrors, Bonding, Electrostatics, 42 Engineering, 71 Classical And Quantum Mechanics, Actuators, Optical Systems, Lawrence Livermore National Laboratory
General Physics, Mirrors, Bonding, Electrostatics, 42 Engineering, 71 Classical And Quantum Mechanics, Actuators, Optical Systems, Lawrence Livermore National Laboratory
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