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Vernier MOEMS alignment mechanisms

descriptionPublicationkeyboard_double_arrow_right Article 11 Oct 2006Publisher:IEEEJournal:IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.
Authors: R.R.A. Syms; H. Zou; J. Stagg;

doi: 10.1109/omems.2005.1540147

Vernier MOEMS alignment mechanisms

Abstract

Positional precision in MOEMS alignment is increased beyond the value set by pattern transfer using a Vernier mechanism based on multiple rack-and-tooth latches. Two- and four-section latches are demonstrated, and limits in precision magnification identified

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
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