
An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.
EWI-9154, METIS-228395, IR-54337
EWI-9154, METIS-228395, IR-54337
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