Our study aims to realize artificial cilia with metachronal wave and to apply them to a micro pump. Metachronal wave is a typical motion observed in natural cilia motion of living organisms. To clarify the characteristics of fluid transport by metachronal waves, we fabricated two modes of artificial cilia that form symplectic and antiplectic metachronal waves, and drove them in silicone oil. We used particle imaging velocimetry (PIV) to visualize the flows generated by these metachronal waves. This is the first time that these two types of metachronal waves were generated in artificial cilia.