Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation

descriptionPublicationkeyboard_double_arrow_right Article 01 Dec 2002 English Publisher:Institute of Electrical and Electronics Engineers (IEEE)Journal:IEEE Journal of Solid-State Circuits, volume 37, pages 1,860-1,866 (issn: 0018-9200,

Copyright policy )

Authors: John A. Geen; Steven J. Sherman; John F. Chang; Stephen R. Lewis;

doi: 10.1109/jssc.2002.804345

Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation

- Summary
- Metrics

Abstract

The design principles of a mass-produced surface micromachined gyroscope are described. The device is integrated on a single 3 mm/spl times/3 mm chip with a 3-/spl mu/m BiCMOS process. It has a 4-/spl mu/m-thick polysilicon structure, 5-V 6-mA supply, 12.5-mV//spl deg//S sensitivity, 10 000:1 dynamic range, 30 000-gee shock survival, and -55/spl deg/C to +85/spl deg/C operating temperature.

Related Organizations

Analog Devices (United States)
United States

Impact byBIP!

	selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	221
	popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.	Top 1%
	influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	Top 0.1%
	impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.	Top 10%