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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Journal of Microelec...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Journal of Microelectromechanical Systems
Article . 2006 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
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Benchtop Polymer MEMS

Authors: R. Delille; M.G. Urdaneta; S.J. Moseley; E. Smela;

Benchtop Polymer MEMS

Abstract

Loctite photopatternable adhesives 3108, 3340, and 3525 are introduced for microelectromechanical systems (MEMS) applications. These materials are patterned within minutes by exposure to ultraviolet (UV) light followed by rinsing with a solvent; no further processing is required. Because the uncured fluid is relatively insensitive to room light, this can be done on any lab bench without the requirement for a clean room. The materials can be spin-coated to obtain films, or cast between spacers for layers up to 1 cm thick, and the cured polymers range from elastomeric to rigid. These adhesives are of interest for rapid, inexpensive fabrication of relatively low-resolution features (tens to hundreds of micrometers) by photocuring. They can alternatively be molded, like polydimethylsiloxane (PDMS), to achieve high resolution, as well as irreversibly bonded after an O2 plasma treatment. In addition, like SU8, they can be used as molds for patterning PDMS. Initial characterization of resolution, swelling, and biocompatibility were performed. One of the polymers, 3340, can be used for packaging bioMEMS-on-complementary-metal-oxide-semiconductor (CMOS) chips, exploiting its biocompatibility and its photopatternability at thicknesses of 1500 mum to cover the bond wires while exposing the chip surface. As further demonstrations of the versatility of these materials, multilevel, interconnected channel structures were fabricated with a gelatin sacrificial layer, and magnetic films were prepared, since the polymers remain patternable even with additives

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
30
Average
Top 10%
Top 10%
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