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Staggered mode MEMS gyroscope

Authors: Ashraf Mahmoud; Wael Fikry; Yasser M. Sabry; Mohamed A. E. Mahmoud;

Staggered mode MEMS gyroscope

Abstract

This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency trimming. The concept is applied on the design and analysis of fully decoupled gyroscope based on the SOI MUMPS process and operating around a resonance frequency of 5 kHz. The concept is extendable for multi-degree of freedom for wider bandwidth extension.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Average
Average
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