Watermark induced High Density Via failures in sub micron CMOS fabrication

Alex Chew; H.H. Au; S.H. Han; T.L. Neo; Jackson Tan; K.W. Chai; Samuel Chua

Found an issue? Give us feedback

https://doi.org/10.1...arrow_drop_down

https://doi.org/10.1109/issm.2...

Article . 2006 . Peer-reviewed

Data sources: Crossref

https://dx.doi.org/10.1109/iss...

Article

Data sources: Microsoft Academic Graph

Watermark induced High Density Via failures in sub micron CMOS fabrication

descriptionPublicationkeyboard_double_arrow_right Article 01 Sep 2006Publisher:IEEEJournal:2006 IEEE International Symposium on Semiconductor Manufacturing

Authors: Alex Chew; H.H. Au; S.H. Han; T.L. Neo; Jackson Tan; K.W. Chai; Samuel Chua;

doi: 10.1109/issm.2006.4493007

Watermark induced High Density Via failures in sub micron CMOS fabrication

- Summary
- Metrics

Abstract

High via resistance was detected in the high density via structure in our 0.15 mum BEOL (Back-End-Of-Line) yield monitoring test vehicle. A localized insulating layer was found on top of plug in test vehicle causing high via resistance. The failure was attributed to watermark induced contaminants on top of the W plug. It was shown that the failure could be avoided by eliminating watermark formation on the wafer in the post CMP cleaning process.

Impact byBIP!

	selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	0
	popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.	Average
	influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	Average
	impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.	Average

Found an issue? Give us feedback

0

Average

Fields of Science

Fields of Science

Upload OA version

Are you the author of this publication? Upload your Open Access version to Zenodo!

It’s fast and easy, just two clicks!

uploadUpload now