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We introduce a simple and intuitive model to relate the amplitude of random telegraph noise (RTN) fluctuations to the columbic influence of single trap charges on the inversion layer. The prediction of this model is in excellent agreement with results extracted from experiment using the “hole-in-the-inversion-layer” model for RTN amplitude. This new model allows us to quantitatively examine the impact of “worst-case” RTN in future scaling nodes.
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