Excimer lasers were invented in 1975, and the first human eye treatment with VISX laser technology was in 1987. Since then many advances in LASIK surgery and related diagnostic and control techniques have led to improved vision correction with over 95% of patients corrected to 20/20 vision or better. This paper describes the development of excimer laser surgery and recent results, wavefront-guided vision correction methods, and the equipment required to achieve these results. Specific requirements imposed on the 193 nm excimer laser, on the laser beam control, the electronic controls, and the controlling software have led to development of laser systems and diagnostic systems unique to LASIK surgery. These include development of a highly reliable laser system with tightly controlled energy output and precision beam shaping and positioning. This development and widely successful use in refractive surgery are reviewed in this paper.