Discusses the use of low-stress silicon nitride for the insulation of a silicon-based multielectrode array. Tested parameters include adhesion, resistance, and biocompatibility. Adhesion of the silicon nitride to silicon test strips and resistance measurements made during accelerated life testing show favorable results. Initial biocompatibility testing has shown that the material is non-toxic. These initial findings make low-stress silicon nitride a promising material for the insulation of multielectrode arrays. >