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Microfabrication of plasma nanotorch tips for localized etching and deposition

Authors: Wen Yuan; Carlos H. Mastrangelo; Massood Tabib-Azar; Yan Xie;

Microfabrication of plasma nanotorch tips for localized etching and deposition

Abstract

We present the microfabrication and initial testing of an AFM-tip like device, or nanotorch, that is capable of generating a very localized microplasma at its tip. The submicron region near its tip provides a unique manufacturing environment where new methods for controlled direct-write micro and nanofabrication can be tested. The device has been fabricated using both surface and bulk micromaching techniques. We demonstrated both localized submicrometer oxidazion patterning and imaging with the same device. Preliminary experiments have also been carried out demonstrating localized plasma etching of a polymer surface at atmospheric conditions with an AC voltage of 1000V.

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
9
Average
Top 10%
Top 10%
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