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Modelling and simulation of diaphragm based MEMS acoustic sensors

Authors: T. Shanmuganantham; Ashish;

Modelling and simulation of diaphragm based MEMS acoustic sensors

Abstract

In this paper we present a simpler technique for designing an acoustic sensor based on Zinc Oxide as thin film for diaphragm. This diaphragm thickness has been optimized to withstand sound pressure level range of 100–200 dB. Stress distributions using Intellisuite has been plotted. We utilize MEMS technology to design acoustic displacement sensor chips on single crystalline silicon. A SiO 2 layer behaves as dielectric. The diaphragm exhibits excellent physical and chemical properties that include membrane forming ability, insensitive to the background pressure and good mechanical strength. The diaphragm shows relative change in displacement in response to different sound pressure level.

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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