Hermeticity Investigation of MEMS Vacuum Packaging

Dong Lin; Zhiyin Gan; Xuefang Wang; Chenggang Wang; Honghai Zhang; Sheng Liu

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https://doi.org/10.1...arrow_drop_down

https://doi.org/10.1109/icept....

Article . 2006 . Peer-reviewed

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https://dx.doi.org/10.1109/ice...

Article

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Hermeticity Investigation of MEMS Vacuum Packaging

descriptionPublicationkeyboard_double_arrow_right Article 01 Aug 2006Publisher:IEEEJournal:2006 7th International Conference on Electronic Packaging Technology

Authors: Dong Lin; Zhiyin Gan; Xuefang Wang; Chenggang Wang; Honghai Zhang; Sheng Liu;

doi: 10.1109/icept.2006.359660

Hermeticity Investigation of MEMS Vacuum Packaging

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Abstract

The vacuum packaging is one of the most difficult problems to solve in the MEMS. In the MEMS vacuum packaging, the most important quality standard is the leak rate, which determines the vacuum maintaining in the vacuum packages. This paper presents two methods together to measure the leak rate. The authors also study the effect of extending the dwell time on the measured leak rate. The results of the relationship between measured leak rate and real leak rate is investigated.

Related Organizations

Wuhan National Laboratory for Optoelectronics
China (People's Republic of)
Huazhong University of Science and Technology
China (People's Republic of)

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