
This paper presents a general overview of the theory and operation of Linear Ultrasonic Motors (LUMs). A nominal linear model of the LUM is used to perform the parametric estimation. Subsequently, with the estimated parameters, two controllers are designed to carry out the nano-positioning using a Proportional-Derivative (PD) controller plus a Generalized Proportional Integral (GPI) Observer and a PD controller plus a Disturbance Observer (DOB), then the performance of both are compared. External and internal perturbations are assumed to be a lumped bounded disturbance and its estimate is used in the design of the controller to compensate its effects. Experiments with a laboratory prototype allow evaluating the good performance of both control schemes obtaining steady-state position errors of 50 nm using both disturbance estimators.
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 2 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
