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Design of a 2-axis MEMS accelerometer

Authors: Jean Marie Darmanin; Ivan Grech; Edward Gatt; Owen Casha;

Design of a 2-axis MEMS accelerometer

Abstract

The miniaturisation and reduction in cost of acceleration sensors led to the increase of use of said sensors in a large number of devices. Such include: Inertial Measurement Units (IMUs), air-bag deployment mechanism and consumer electronic devices. This paper presents three alternative designs of capacitive sensing MEMS 2-axis accelerometers. All designs have a common fabrication process but each design features different characteristics in terms of spring design and layout. A novel design methodology was devised such that the three designs have approximately the same characteristics such that cross-comparisons can be done. The resonant frequency was designed to be about 1.5 kHz and the accelerometers have a sensitivity of 400 aF/ms−2. Behavioural Model Simulations using Saber® Simulator and Finite Element Method (FEM) analysis were performed on these three designs. A comparison between the two different types of simulators was performed. This resulted in the conclusion that both simulators have comparable results and the variation between theoretical and simulation results can be attributed to the assumptions and inaccuracies of the mathematical model used in the theoretical computation.

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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
4
Average
Top 10%
Average
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