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High-bandwidth control design for a piezoelectric nanopositioning stage

Authors: Jinchuan Zheng; Minyue Fu 0001;

High-bandwidth control design for a piezoelectric nanopositioning stage

Abstract

To achieve fast and accurate tracking of a wideband reference trajectory, the piezoelectric (PZT) actuator requires a high-bandwidth control system, which is however restricted by the resonant mode of the PZT positioning stage. In this paper, we study two resonant compensation techniques to damp the resonant mode for increased servo bandwidth. First, we present a feedback control system using a conventional notch filter (NF). Subsequently, we develop a complex lead compensator (CLC) using the phase-stabilized compensation method. Unlike the NF that is aimed at reducing the resonant peak gain, the CLC specializes in shaping the phase of open-loop system at the resonant frequency. The analysis shows that the closed-loop bandwidth achieved by the CLC is around four times higher than that of the NF without sacrificing the stability margin. Finally, we propose a multi-resonant filter (MRF) to suppress periodic tracking errors by significantly attenuating the gains at specified frequencies in the sensitivity function. The experimental results verify that the CLC is superior in disturbance compensation and periodic trajectory tracking as compared to the NF, and the add-on MRF can greatly reduce the tracking error.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
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