Vacuum glazing is a new energy-saving material; the damage of it is caused mainly by the tensile stress. In this paper, stress distribution and parameters of vacuum glazing effect on stress and deformation have been researched according the Atmospheric effects using finite element method. The paper suggests that support pillar spacing and change of glazing thickness have larger influence on stress distribution and Cross-sectional area almost has no effect on the tensile stress on the outer surface of glazing. It also shows that stress distribution of the part which is close to axis center of glazing, changes a lot. And closer to contacting area, more violent the stress changes become. However, the change of stress tends to be slow in parts which are close to the top of glazing surface.