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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao IEEE Transactions on...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
IEEE Transactions on Components and Packaging Technologies
Article . 2010 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
https://doi.org/10.1109/ectc.2...
Article . 2008 . Peer-reviewed
Data sources: Crossref
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Improving copper electrodeposition in the microelectronics industry

Authors: null Yihua Liu; null Liang Yin; S. Bliznakov; P. Kondos; P. Borgesen; D.W. Henderson; C. Parks; +3 Authors

Improving copper electrodeposition in the microelectronics industry

Abstract

Sporadic voiding within the interfacial Cu3Sn intermetallic compound (IMC) layer-sometimes referred to as ?Kirkendall voiding?-has been found to lead to degradation of solder joint reliability in board level, mechanical shock testing. It has been suggested that the voiding phenomenon is a result of the incorporation of organic impurities in the copper (Cu) deposit during electroplating. In the present study, Cu samples were electroplated galvanostatically from a generic solution, containing Cl- ions, as well as a suppressor [polyethylene glycol (PEG)], and a brightener (bis(3-sulfopropyl) disulfide, SPS) as additives. Overpotential transients were measured during electroplating with a range of current densities (0.5-40 mA cm-2) in baths with various compositions. Effects of the bath chemistry on the Cu surface morphology, as well as on the propensity for voiding after soldering, were also investigated. Elemental analysis of selected samples was performed by SIMS. Plating at 10-20 mA·cm-2 with an optimized bath composition led to Cu with a fine-grain structure and smooth appearance. Solder joints formed from these deposits remained void free after soldering and thermal aging. Lower current densities, ran in the same plating bath, led to a significant propensity for voiding, apparently because of incorporation of, principally, SPS and its breakdown products into the growing layer. Continuous plating at 10 mA cm-2 for up to 18 hours without replenishment revealed a strong dependence on bath aging, with Cu changing from ?void-proof? to clearly ?void-prone.? These trends were attributed to the different rates of consumption for PEG and SPS and changes in the contaminants being incorporated in the deposits. In general, differences in the voiding behavior of the plated Cu could be predicted by monitoring a set of characteristic overpotential transient signatures.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
37
Top 10%
Top 10%
Top 10%
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