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http://arxiv.org/pdf/0805.0860...
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arXiv.org e-Print Archive
Preprint . 2008
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Conference object . 2008
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https://doi.org/10.1109/dtip.2...
Article . 2008 . Peer-reviewed
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https://dx.doi.org/10.48550/ar...
Article . 2008
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Megasonic enhanced electrodeposition

descriptionPublicationkeyboard_double_arrow_right Article , Preprint , Conference object 01 Apr 2008Embargo end date: 01 Jan 2008Publisher:IEEEJournal:2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Authors: Jens Georg Kaufmann; Marc P. Y. Desmulliez; D. Price;

doi: 10.1109/dtip.2008.4753020 , 10.48550/arxiv.0805.0860

arXiv: 0805.0860

Megasonic enhanced electrodeposition

Abstract

A novel way of filling high aspect ratio vertical interconnection (microvias) with an aspect ratio of >2:1 is presented. High frequency acoustic streaming at megasonic frequencies enables the decrease of the Nernst-diffusion layer down to the sub-micron range, allowing thereby conformal electrodeposition in deep grooves. Higher throughput and better control over the deposition properties are possible for the manufacturing of interconnections and metal-based MEMS.

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

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Keywords

[INFO.INFO-OH] Computer Science [cs]/Other [cs.OH], FOS: Computer and information sciences, Computer Science - Other Computer Science, Other Computer Science (cs.OH)

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    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 5
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    		 Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    		 Top 10%
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
5
Average
Top 10%
Top 10%
Green
Related to Research communities
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