Design and fabrication of a novel micro electromagnetic actuator
Design and fabrication of a novel micro electromagnetic actuator
The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
- National Pingtung University Taiwan
- Dayeh University Taiwan
- National Cheng Kung University Taiwan
[INFO.INFO-OH] Computer Science [cs]/Other [cs.OH], FOS: Computer and information sciences, Computer Science - Other Computer Science, Other Computer Science (cs.OH)
[INFO.INFO-OH] Computer Science [cs]/Other [cs.OH], FOS: Computer and information sciences, Computer Science - Other Computer Science, Other Computer Science (cs.OH)
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