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Test Wafer Management and Automated Wafer Sorting

Authors: Aziza Faruqi; Raymond Goss; Diwas Adhikari; Thomas Kowtsch;

Test Wafer Management and Automated Wafer Sorting

Abstract

Typical usage of test wafers (TW) in semiconductor manufacturing involves testing and development of new processes, equipment qualification, and process monitoring activities. A 300 mm fab can potentially spend millions of dollars each year purchasing test wafers. Over the years, improvements in TW management systems have led to a reduction in cost by enabling better inventory control. However, even with the increased level of automation of 300 mm fabs, the TW management process still leaves much to be automated. In this paper, we describe an automated TW management system and the performance benefits derived from its usage.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
2
Average
Average
Average
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