A pragmatic approach to managing APC FDC in high volume logic production

descriptionPublicationkeyboard_double_arrow_right Article 01 Oct 2003Publisher:IEEEJournal:Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

Authors: R. Joyce-Wohrmann;

doi: 10.1109/asmc.2003.1194511

A pragmatic approach to managing APC FDC in high volume logic production

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Abstract

At Infineon Technologies APC fault detection is now implemented in many process areas in its high volume fabs. With the APC Software "APC-Trend" process engineers and maintenance can detect and classify anomalies in machine and process parameters and supervise them on the basis of an automated alarming system. An overview of the current usage of APC FDC at Infineon is given.

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