Automatic assembly of quartz tuning fork and microcantilever

descriptionPublicationkeyboard_double_arrow_right Article 01 Jul 2012Publisher:IEEEJournal:2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)

Authors: Chiao-Hua Cheng; Jian-Hua Chen; Jen-Yu Shieh; Shao-Kang Hung;

doi: 10.1109/aim.2012.6266038

Automatic assembly of quartz tuning fork and microcantilever

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Abstract

Conventional atomic force microscopes (AFMs) detect microcantilever deflection using an optical lever system. However, the complex mechanism of the optical lever system and the alignment of the laser spot on the microcantilever prevent such AFM systems from scanning large samples. AFM systems using a quartz tuning fork (QTF) as a force sensor have been proven feasible, and enhance compactness of the AFM system. This paper presents the automatic assembly of the QTF sensor and the microcantilever of commercial AFM probe using a visual servo method.

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National Chiao Tung University
Taiwan

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