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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Pure Utrecht Univers...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Pure Utrecht University
Conference object . 2003
https://doi.org/10.1109/memsys...
Article . 2003 . Peer-reviewed
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A practical galvanic etch-stop in KOH using sodium hypochlorite

Authors: X H Xia; Patrick J. French; E.J. Connolly; John J. Kelly; S. Sakarya;

A practical galvanic etch-stop in KOH using sodium hypochlorite

Abstract

We report a new galvanic etch-stop (ES) for KOH which requires a gold:exposed Si area ratio of only /spl sim/1. Previously, the galvanic ES was shown to be effective only in TMAH with a gold:exposed Si area /spl sim/16. This limitation was due to insufficient oxygen at the gold electrode. Studies using hypochlorite (OCl) have shown it to be a strong oxidising agent in KOH, thus suitable for shifting electrochemical potentials, and for micropyramid suppression during etching. This new ES works by adding small amounts of sodium hypochlorite, NaOCl, to KOH solutions. The dependency of the galvanic ES on KOH concentration and temperature is investigated. Also, we report on the effects of the added NaOCl on etch rates. SEM images are used to examine the galvanically etch-stopped membranes.

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
2
Average
Average
Average
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