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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Journal of Microelec...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Journal of Microelectromechanical Systems
Article . 2000 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
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Multi-walled microchannels: free-standing porous silicon membranes for use in /spl mu/TAS

Authors: R.W. Tjerkstra; A. van den Berg; J.J. Kelly; G.E. Gardeniers;

Multi-walled microchannels: free-standing porous silicon membranes for use in /spl mu/TAS

Abstract

Electrochemically formed porous silicon (PS) can be released from the bulk silicon substrate by underetching at increased current density. Using this technique, two types of channels containing free-standing layers of PS were constructed, which were called multi-walled microchannels (MW μCs). They can be used in devices like microsieves, microbatteries, and porous electrodes. Two types of MWμC were made: the 'conventional' version, consisting of two or more coaxially constructed microchannels separated by a suspended PS membrane, and the buried variety, where a PS membrane is suspended halfway an etched cavity surrounded by silicon nitride walls. The latter is more robust. The pore size of the PS was measured using transmission electron microscopy and field emission gun scanning electron microscopy (FEGSEM) and found to be of the order of 7 nm.

Country
Netherlands
Related Organizations
Keywords

Electrochemical etching, Porous silicon, Pore size, Silicon micromachining, Microsieve

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
40
Average
Top 10%
Top 10%
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