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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Journal of Microelec...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Journal of Microelectromechanical Systems
Article . 1995 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
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Electrophysics of micromechanical comb actuators

Authors: W.A. Johnson; L.K. Warne;

Electrophysics of micromechanical comb actuators

Abstract

A simple approximate theory is developed for the electrostatic forces operating in a micromechanical comb actuator. The comb drive is considered both without (for simplicity) and with an underlying ground plane. The forces are partitioned into local forces (electric fields confined to the cross-sections of the individual comb fingers) and global force corrections (electric fields resulting from effective equipotential sheets representing the engaged and unengaged comb finger regions). The local forces are obtained by applying the principle of virtual work (both engaged and unengaged regions are involved when a ground plane is present beneath the comb fingers). The global forces are obtained from the force between magnetic current filaments introduced to model the electric-potential discontinuities in the effective equipotential sheets of the engaged and unengaged finger regions. Conformal mapping, in addition to a static mode decay approximation, is used to obtain simple and accurate formulas for the local charge per unit length (local forces) and, when a ground plane is present, for the effective sheet potentials (magnetic currents and global forces). The forces in the separated case (which are also global in nature) are also obtained by the principle of virtual work. The results of the paper show that the attractive local forces are independent of engagement distance and the smaller repulsive global forces are inversely proportional to engagement distance. The attractive separated forces are inversely proportional to the separation distance without the ground plane and inversely proportional to the square of the separation distance with the ground plane. >

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
118
Top 10%
Top 1%
Top 10%
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