Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry
Copyright policy )Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry
In this letter, a 1.8-mm x 1.8-mm capacitive micromachined ultrasonic transducer (CMUT) element is experimentally characterized by means of optical measurements. Optical displacement measurements provide information on the resonant behavior of the single membranes and also allow us to investigate the dispersion in the frequency spectrum of adjacent membranes. In addition, higher order mode shapes are observed, showing that either symmetrical or asymmetrical modes are excited in CMUT membranes. Laser interferometry vibration maps, combined with quantitative displacement measurements, provide information about the quality and repeatability of the fabrication process, which is a basic requirement for 2-D array fabrication for ultrasound imaging.
- Roma Tre University Italy
- National Research Council Italy
- University of Basilicata Italy
- University of Franche-Comté France
- Istituto di Fotonica e Nanotecnologie Italy
Radio Waves, Transducers, Vibration map, Electric Capacitance, Sensitivity and Specificity, Vibration, Motion, Imaging, Three-Dimensional, Laser Interferometry, Coated Materials, Biocompatible, Materials Testing, Ultrasonics, Lasers, Silicon Compounds, Reproducibility of Results, Membranes, Artificial, Oxides, Equipment Design, 624, CMUT; Vibration measurement; Interferometry, Equipment Failure Analysis, Resins, Synthetic, cMUT, Interferometry
Radio Waves, Transducers, Vibration map, Electric Capacitance, Sensitivity and Specificity, Vibration, Motion, Imaging, Three-Dimensional, Laser Interferometry, Coated Materials, Biocompatible, Materials Testing, Ultrasonics, Lasers, Silicon Compounds, Reproducibility of Results, Membranes, Artificial, Oxides, Equipment Design, 624, CMUT; Vibration measurement; Interferometry, Equipment Failure Analysis, Resins, Synthetic, cMUT, Interferometry
selected citations These citations are derived from selected sources.This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).24 popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.Top 10% influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).Top 10% impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.Top 10%
Citations provided by BIP!Popularity provided by BIP!