The process engineer's workbench

descriptionPublicationkeyboard_double_arrow_right Article 01 Apr 1988Publisher:Institute of Electrical and Electronics Engineers (IEEE)Journal:IEEE Journal of Solid-State Circuits, volume 23, pages 377-386 (issn: 0018-9200,

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Authors: Andrzej J. Strojwas; Stephen W. Director;

doi: 10.1109/4.998

The process engineer's workbench

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Abstract

A workstation-based implementation of a software system aimed at VLSI fabrication process synthesis is described. The system provides a versatile user interface to a number of process design aids, and incremental simulation capability, and an attractive graphical display of simulation results. >

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Carnegie Mellon University
United States

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