A generalized first-order scaling theory for BiCMOS digital circuit structures is presented. The effect of horizontal, vertical, and voltage scaling on the speed performance of various BiCMOS circuits is presented. The generalized scaling theory is used for the MOSFET, and the constant collector current (CIC) scaling scheme is used for the bipolar junction transistor (BJT). In scaling the bipolar transistor, polysilicon emitter contact and bandgap narrowing are taken into account. A case study for scaling BiCMOS circuits operating at 5- and 3.3-V power supplies shows that scaling improved BiCMOS buffers more significantly than CMOS buffers. Moreover, the low delay-to-load sensitivity of BiCMOS is preserved with scaling. >