Molecular-dynamics simulations of sputtering

descriptionPublicationkeyboard_double_arrow_right Article 25 Nov 2003 English Publisher:The Royal SocietyJournal:Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences, volume 362, pages 157-176 (issn: 1364-503X, eissn: 1471-2962,

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Authors: Roger, Smith; Steven D, Kenny; Deerajen, Ramasawmy;

doi: 10.1098/rsta.2003.1308

pmid: 15306282

Molecular-dynamics simulations of sputtering

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Abstract

The use of molecular-dynamics simulations to understand the ejection processes of particles from surfaces after energetic ion bombardment is discussed. Substrates considered include metals, covalent and ionic materials, polymers and molecular solids. It is shown how the simulations can be used to aid interpretation of experimental results by providing the underlying mechanisms behind the ejection processes.

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Loughborough University
United Kingdom

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