Transport theories of sputtering

descriptionPublicationkeyboard_double_arrow_right Article 25 Nov 2003 English Publisher:The Royal SocietyJournal:Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences, volume 362, pages 139-156 (issn: 1364-503X, eissn: 1471-2962,

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Authors: Mario M, Jakas;

doi: 10.1098/rsta.2003.1305

pmid: 15306281

Transport theories of sputtering

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Abstract

The use of linear transport theory to calculate several observable quantities in the sputtering process is reviewed. The basic equations previously solved in the literature to obtain the sputtering yield and the energy spectra of sputtered atoms are re-derived and briefly analysed. Comparison with experiments and comments on limitations of theoretical models are included.

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University of La Laguna
Spain

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