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Evaluation of both image resolution and contrast-to-noise ratio in scanning electron microscopy

Authors: Tohru, Ishitani; Mitsugu, Sato;

Evaluation of both image resolution and contrast-to-noise ratio in scanning electron microscopy

Abstract

The contrast-to-gradient (CG) resolution has been defined as a weighted harmonic mean of the local resolution, i.e. the length defining the object's local fine structure at each pixel position. The newly defined resolution Res is defined as 2 sigma/ sqrt 2, where 2 sigma is a sharpness factor of the image pattern obtained by the conversion 2 sigma = ARCG + B using default constants A and B. In the present study, we have extended the algorithm to change the constants from default values to calibrated ones using standard images that are same in both pattern and contrast-to-noise ratio (CNR) as the original SEM image to be evaluated. The calibrated image resolution with a weak noise dependency is evaluated with the CNR as a given parameter.

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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
11
Top 10%
Top 10%
Average
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