The increasing wear resistance of parts is one of the main tasks of engineering. The achievement of stable parameters is a difficult task. It depends on capabilities of equipment, type of evaporator, interaction evaporator with the evaporating substance and deposition process.The control system must foresee and identify emerging cracks or damage of the system components. At every stage software of control process system must automatically make the optimal decisions based on information about the process. It also improves the efficiency of the operator. This article focuses on the results of using intelligent control system technological process.