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handle: 2066/35127
The photoelectrochemistry of silicon carbide in alkaline solution was investigated with a view to wet-chemical etching applications. Anodic dissolution and passivation of the p-type semiconductor was observed in the dark; illumination with supra-bandgap light was required for oxidation of the n-type electrode. At low KOH concentrations and low light intensities, diffusion-controlled etching is observed for n-type SiC. We show that open-circuit photoetching can be used for defect revealing. Furthermore, based on the electrochemical properties of silicon carbide and silicon, we expect various material-selective etching processes to be possible.
Applied Materials Science
Applied Materials Science
citations This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 28 | |
popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Top 10% | |
influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Top 10% | |
impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Top 10% |