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Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

Authors: Jieyu Liu; Wenjuan Liu; Zhiwei Wen; Xin Tong; Yan Liu; Yao Cai; Chengliang Sun;

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

Abstract

Lateral-excited bulk acoustic wave resonators (XBARs) have a large electromechanical coupling coefficient and low mechanical loss. However, XBARs have not yet been commercialized in 5G communications due to spurious modes, high TCF, and low-power handling. This paper presents a lateral-excited bulk acoustic wave resonator with piston mode electrodes named PLBAR. Compared to the conventional interdigital transducer structure, the PLBAR suppresses the transverse waves due to the irregular boundary caused by piston mode electrodes. Higher order modes are also to some extent suppressed by increasing in metallization rate. The fabricated PLBAR achieves a high Keff2 of 26.43% at 5.2 GHz using a 350 nm Z-cut lithium niobate on insulator substrate, effectively suppressing the transversal mode. Additionally, the power durability exceeds +14 dBm due to the increased metallization of the piston mode electrodes. The measured temperature coefficient of PLBAR is −42.55 ppm/°C. The PLBAR addresses some of the limitations of the XBARs and demonstrates significant improvements in performance without requiring additional fabrication steps, making it a promising solution for RF resonators in 5G communication systems.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
7
Top 10%
Top 10%
Top 10%
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