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Applied Physics Letters
Article . 2024 . Peer-reviewed
License: CC BY
Data sources: Crossref
image/svg+xml art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos Open Access logo, converted into svg, designed by PLoS. This version with transparent background. http://commons.wikimedia.org/wiki/File:Open_Access_logo_PLoS_white.svg art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos http://www.plos.org/
https://dx.doi.org/10.48550/ar...
Article . 2023
License: CC BY
Data sources: Datacite
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Piezoresistive snap-through detection for bifurcation-based MEMS sensors

Authors: I. Litvinov; G. Spaer Milo; A. Liberzon; S. Krylov;

Piezoresistive snap-through detection for bifurcation-based MEMS sensors

Abstract

We report on the piezoresistive method for detecting stability loss events in microelectromechanical sensors based on bifurcation. The method involves measuring the resistivity changes of an entire beam to detect snap-through transitions in an electrostatically actuated, bistable double-clamped crystalline silicon (Si) microbeam. The applicability of the suggested approach in two types of sensors—an ambient air temperature sensor or a mean air velocity sensor, is demonstrated. In both cases, the bistable beam, serving as the sensing element, is affected by the electrothermal Joule's heating and air cooling. The measured signal is obtained by monitoring the critical voltages of the snap-through transitions. Piezoresistive sensing is especially suitable for the response monitoring of the exposed to the environment, free-standing heated microbeam sensors, where optical, piezoelectric, or electrostatic interrogation methods are not applicable. The approach can be implemented in various bifurcation microsensors and for response monitoring of bistable actuators.

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Keywords

FOS: Physical sciences, Physics - Applied Physics, Applied Physics (physics.app-ph)

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
9
Top 10%
Average
Top 10%
Green
hybrid