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AIP Advances
Article . 2023 . Peer-reviewed
License: CC BY
Data sources: Crossref
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AIP Advances
Article . 2023
Data sources: DOAJ
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Two-dimensional grating interferometer with nanometer accuracy

Authors: Yaowen Ban; Guobo Zhao; Hui Liu; Zhenghui Zhang; Bangdao Chen; Bingheng Lu; Hongzhong Liu;

Two-dimensional grating interferometer with nanometer accuracy

Abstract

A two-dimensional grating interferometer with the nanometer accuracy is proposed, which employs a transmissive two-dimensional diffraction grating and a corner cube prism in its optical configuration. The distinctive features of this optical path configuration are as follows: (i) Fourfold optical subdivision is achieved based on the principle of secondary diffraction, enhancing optical subdivision capability. (ii) The utilization of a corner cube prism configuration enables parallel retroreflection of diffracted light, facilitating ease of optical alignment. Utilizing a two-dimensional transmissive grating with a period of 4 µm (resulting in an optical signal period of 1 µm after fourfold optical subdivision), the two-dimensional grating interferometer achieves measurement resolutions better than 8 nm along the x and y directions. Within a 100 µm range, the grating displacement errors are superior to ±38 and ±36 nm. The repeatability (standard deviation of error) during a reciprocating motion with a 4 µm stroke is superior to 14 nm. The proposed two-dimensional grating interferometer enables nanoscale resolution measurements, showcasing notable linear measurement capabilities and repeatability. It finds potential applications in ultra-accuracy positioning and machining equipment. The utilization of gratings with smaller periods holds the promise of realizing picometer-level measurement potential.

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Keywords

Physics, QC1-999

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
7
Top 10%
Average
Top 10%
gold