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Journal of Applied Physics
Article . 2022 . Peer-reviewed
License: CC BY
Data sources: Crossref
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Improved methods for design of PLD and combinatorial PLD films

Authors: Hogne Lysne; Thomas Brakstad; Morten Kildemo; Turid Reenaas;

Improved methods for design of PLD and combinatorial PLD films

Abstract

Pulsed laser deposition (PLD) is a powerful technique for prototyping thin film materials, both single component (single composition) films and films with a varying composition (e.g., lateral continuous compositional spread, CCS). In this work, we improve one of the simulation methods used to design the deposition of PLD films: We extend the mathematical model for the material spread on the substrate, T1(x,y), for each laser pulse hitting the target, and we use a more accurate method to determine T1(x,y) experimentally. The deposition of the material on the substrate is simulated by repetitively adding T1(x,y), from one or more targets, at the selected location on the substrate. Using the new model, a high agreement between the simulated and grown films’ thickness and composition across the substrate was obtained. The basis for the high agreement is the use of variable angle spectroscopic ellipsometry to carefully determine T1(x,y) by measuring at 794 locations on the 50.8 mm (2 in.) diameter substrates. Factors, such as variation in optical properties and porosity across the plume/calibration films, were considered in the determination of the thicknesses. As test cases, we simulated and deposited (single component) TiO2 thin films and (CCS) TiO2 films doped with Cr and N, deposited on 50.8 mm diameter Si wafers. The modeling and simulations are implemented in an open-source Python library, pyPLD.

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Powered by OpenAIRE graph
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
16
Top 10%
Average
Top 10%
hybrid