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A compact extreme ultraviolet high-throughput spectrometer based on the multilayer varied-line-spacing grating

Authors: Xiaowei Yang; Tsu-Chien Weng;

A compact extreme ultraviolet high-throughput spectrometer based on the multilayer varied-line-spacing grating

Abstract

In this paper, we propose a compact extreme ultraviolet high-throughput spectrometer covering the 50–70 eV energy band. The key element in this spectrometer is a multilayer varied-line-spacing grating that operates in near-normal incidence geometry. The spectrometer can obtain one order of magnitude higher throughput compared to the traditional grazing incidence grating spectrometer in this energy band. The spectrum collection time and sample radiation damage can be largely reduced using the presented design.

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Powered by OpenAIRE graph
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Top 10%
Average
Average
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