Negative ion densities in NF3 discharges

K. E. Greenberg; G. A. Hebner; J. T. Verdeyen

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Applied Physics Lett...arrow_drop_down

Applied Physics Letters

Article . 1984 . Peer-reviewed

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https://dx.doi.org/10.1063/1.9...

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Negative ion densities in NF3 discharges

descriptionPublicationkeyboard_double_arrow_right Article 01 Feb 1984 English Publisher:AIP PublishingJournal:Applied Physics Letters, volume 44, pages 299-300 (issn: 0003-6951, eissn: 1077-3118,

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Authors: K. E. Greenberg; G. A. Hebner; J. T. Verdeyen;

doi: 10.1063/1.94731

Negative ion densities in NF3 discharges

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Abstract

This letter shows that the negative ion density in the NF3 discharge is one to two orders of magnitude larger than the electron density. A XeCl laser was used to photodetach the ions and the resultant excess electron population was measured using microwave interferometry.

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University of Illinois at Urbana Champaign
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