Image resolution of the scanning acoustic microscope

descriptionPublicationkeyboard_double_arrow_right Article 15 Dec 1977 English Publisher:AIP PublishingJournal:Applied Physics Letters, volume 31, pages 793-796 (issn: 0003-6951, eissn: 1077-3118,

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Authors: R. D. Weglein; R. G. Wilson;

doi: 10.1063/1.89552

Image resolution of the scanning acoustic microscope

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Abstract

We have measured the spatial frequency response of an experimental scanning acoustic microscope (SAM) at 375 MHz, using an acoustic high-resolution reflection test target consisting of Au bars on a silicon substrate. Although the instrument resolves 1.6-μm line detail quite well, in favorable agreement with theoretical predictions, the shape of the spatial frequency response curve differs substantially from expectations.

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HRL Laboratories (United States)
United States

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