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https://doi.org/10.1063/1.5687...
Article . 1998 . Peer-reviewed
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Mechanical characterization of thin films

Authors: David T. Read;

Mechanical characterization of thin films

Abstract

This paper describes a tensile testing technique that is applicable to the study of the mechanical properties of thin films. The approach has two main components: fabrication of silicon-framed tensile specimens; and testing these specimens in the microtensile testing apparatus. Speckle interferometry is used to obtain accurate displacements needed for measurement of Young’s modulus. Typical results for electron-beam-evaporated films of copper and aluminum are compared to bulk values and to indentation results for thin films.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
bronze