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Real-time out-of-plane displacement measurement using displacement compensation

Authors: Wenxin, Hu; Chen, Xiong; Jingchao, Xu; Wei, Li; Hong, Miao;

Real-time out-of-plane displacement measurement using displacement compensation

Abstract

To determine out-of-plane displacement, it is challenging to simultaneously implement high resolution, wide range, and real-time measurement. This study proposes a method for displacement compensation based on the Michelson single-point displacement measurement system. The direction of fringe movement and amplitude of the object’s displacement was calculated and converted into a feedback-tracking signal. The compensator was driven by the feedback signal to change the reference optical path to keep the fringes stable, and a method to detect fringe movement was developed. A convolutional neural network model was set to distinguish the direction of fringe movement, and a backpropagation neural network was used to calculate the amplitude of the movement using simple image processing at a high speed. The system’s resolution was 10 nm in the range 210 µm, and the tracking time step was smaller than 200 ms. This provides an effective solution for high precision, real-time, and wide range measurement.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
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