
doi: 10.1063/1.51119
Filament Assisted Chemical Vapor Deposition (FA‐CVD) technique has been used to prepare tungsten carbide (WC) thin films. With this simple technique we obtained polycrystalline and stoichiometric WC coatings deposited on crystalline silicon and on stainless steel substrates. Tungsten carbide coatings were studied with Auger Electron Spectroscopy and Scanning Electron Microscopy.
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