
doi: 10.1063/1.5013701
Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), α-Si3N4 and β-Si3N4 phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ∼75–85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (∼27 GPa) along with high values of the elastic recovery coefficient (Re ≥ 0.70).Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), α-Si3N4 and β-Si3N4 phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ∼75–85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (∼27 GPa) along with high values of the elastic recovery coefficient (Re ≥ 0.70).
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