Devices based on LTCC (low-temperature co-fired ceramic) technology are more widely applied in high temperature environments, and the temperature-dependent properties of the LTCC material play an important role in measurements of the characteristics of these devices at high temperature. In this paper, the temperature-dependence of the relative permittivity of DuPont 951 LTCC ceramic is studied from room temperature to 500 °C. An expression for relative permittivity is obtained, which relates the relative permittivity to the resonant frequency, inductance, parasitic capacitance and electrode capacitance of the LTCC sample. Of these properties, the electrode capacitance is the most strongly temperature-dependent. The LTCC sample resonant frequency, inductance and parasitic capacitance were measured (from room temperature to 500 °C) with a high temperature measurement system comprising a muffle furnace and network analyzer. We found that the resonant frequency reduced and the inductance and parasitic capacitance increased slightly as the temperature increases. The relative permittivity can be calculated from experimental frequency, inductance and parasitic capacitance measurements. Calculating results show that the relative permittivity of DuPont 951 LTCC ceramic ceramic increases to 8.21 from room temperature to 500 °C.