
doi: 10.1063/1.4861409
Micromechanical resonators must be clamped to the substrate via anchors to support the suspended microstructure. However, these anchors will introduce anchor loss, and decrease quality factors (Qs) of the micromechanical resonators. To reduce the anchor loss, one dimensional phononic crystal based strips are employed as anchors of the microresonators in this paper. The dispersion relations and eigenmodes of the phononic crystal strips are presented. Flexural mode ring resonator and Lamé mode square plate resonator are designed to verify the effect of phononic crystal strips. The calculated results and finite-element simulations indicate that the leaky energy could be effectively reduced by the phononic crystal strip anchor design. Resonators with different anchor designs are also fabricated and characterized. The measured Qs of the microresonators show that the phononic crystal strips could reduce the energy dissipated through anchors, and with increasing the number of phononic strip periods, Qs of the resonators could be further enhanced. Furthermore, the experimental result also shows that compared with the Lamé mode square plate resonator, the flexural mode ring resonator is more susceptible to the anchor loss.
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